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Journal of Materials Chemistry C 2018

Chemical Interactions in Atomic Layer Deposition of Ge-Sb-Se-Te Films and Their Ovonic Threshold Switching Behavior

Yoo, Sijung, Yoo, Chanyoung, Park, Eui-Sang, Kim, Woohyun, Lee, Yoon Kyeung, Hwang, Cheol Seong
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Year:
2018
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/C8TC01041B
File:
PDF, 2.32 MB
english, 2018
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