Raman Thermometry Measurements and Thermal Simulations for...

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Phinney, Leslie M., Serrano, Justin R., Piekos, Edward S., Torczynski, John R., Gallis, Michael A., Gorby, Allen D.
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Volume:
132
Year:
2010
Language:
english
Journal:
Journal of Heat Transfer
DOI:
10.1115/1.4000965
File:
PDF, 1.37 MB
english, 2010
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