Low damage electrical modification of 4H-SiC via ultrafast...

Journal of Applied Physics 2018 / 04 Vol. 123; Iss. 14

Low damage electrical modification of 4H-SiC via ultrafast laser irradiation

Ahn, Minhyung, Cahyadi, Rico, Wendorf, Joseph, Bowen, Willie, Torralva, Ben, Yalisove, Steven, Phillips, Jamie
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Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5020445
Date:
April, 2018
File:
PDF, 4.87 MB
english, 2018
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