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Low damage electrical modification of 4H-SiC via ultrafast laser irradiation
Ahn, Minhyung, Cahyadi, Rico, Wendorf, Joseph, Bowen, Willie, Torralva, Ben, Yalisove, Steven, Phillips, JamieVolume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5020445
Date:
April, 2018
File:
PDF, 4.87 MB
english, 2018