RF power absorption by plasma of low pressure low power...

AIP Advances 2018 / 03 Vol. 8; Iss. 3

RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field

Kralkina, E. A., Rukhadze, A. A., Nekliudova, P. A., Pavlov, V. B., Petrov, A. K., Vavilin, K. V.
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5023631
Date:
March, 2018
File:
PDF, 4.54 MB
english, 2018
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