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Modeling analysis and fabrication of MEMS capacitive differential pressure sensor for altimeter application
Parthasarathy, Eswaran, Malarvizhi, S.Language:
english
Journal:
Journal of the Chinese Institute of Engineers
DOI:
10.1080/02533839.2018.1454855
Date:
April, 2018
File:
PDF, 1.95 MB
english, 2018