Effect of 1,2,4-triazole on galvanic corrosion between cobalt and copper in CMP based alkaline slurry
Fu, Lei, Liu, Yuling, Wang, Chenwei, Han, LinanVolume:
39
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/39/4/046001
Date:
April, 2018
File:
PDF, 815 KB
english, 2018