Evaluations of the hopping growth characteristics on...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2009 Vol. 27; Iss. 6

Evaluations of the hopping growth characteristics on three-dimensional nanostructure fabrication using focused ion beam

Kometani, Reo, Warisawa, Shin’ichi, Ishihara, Sunao
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3250240
File:
PDF, 542 KB
english, 2009
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