Correction: EUV photofragmentation study of hybrid...

RSC Advances 2018 Vol. 8; Iss. 27

Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

Moura, Cleverson Alves da Silva, Belmonte, Guilherme Kretzmann, Reddy, Pulikanti Guruprasad, Gonsalves, Kenneth E., Weibel, Daniel Eduardo
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Volume:
8
Year:
2018
Language:
english
Journal:
RSC Advances
DOI:
10.1039/C8RA90030B
File:
PDF, 137 KB
english, 2018
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