Preparation and Influencing Factors of Molybdenum Targets and Magnetron-Sputter-Deposited Molybdenum Thin Films
An, Geng, Sun, Jun, Sun, Yuan Jun, Cao, Wei ChengVolume:
913
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.913.853
Date:
February, 2018
File:
PDF, 7.59 MB
english, 2018