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A New Parameter Predicating Gm for Ultra Thin Nitrided Gate Oxide
Hori, Mitsuaki, Tamura, Naoyoshi, Kase, Masataka, Sakuma, Hiroko, Ohota, Hiroyuki, Shigeno, Mayumi, Kataoka, YuuziVolume:
765
Year:
2003
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-765-D3.1
File:
PDF, 179 KB
english, 2003