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Complete Fabrication of a Traversable 3 µm Thick NbN Film Superconducting Coil with Cu plated layer of 42m in Length in a Spiral Three-Storied Trench Engraved in a Si Wafer of 76.2 mm in Diameter Formed by MEMS Technology for a Compact SMES with High Energy Storage Volume Density
Suzuki, Yasuhiro, Iguchi, Nobuhiro, Adachi, Kazuhiro, Ichiki, Akihisa, Hioki, Tatsumi, Hsu, Che-Wei, Sato, Ryoto, Kumagai, Shinya, Sasaki, Minoru, Noh, Joo-Hyong, Sakurahara, Yuuske, Okabe, Kyohei, TaVolume:
897
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/897/1/012019
Date:
September, 2017
File:
PDF, 993 KB
english, 2017