Magnetorheological finishing of silicon for nanometric...

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Magnetorheological finishing of silicon for nanometric surface generation: An experimental and simulation study

Khatri, Neha, Tewary, Suman, Manoj, Xavier J, Garg, Harry, Karar, Vinod
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Language:
english
Journal:
Journal of Intelligent Material Systems and Structures
DOI:
10.1177/1045389X18770869
Date:
April, 2018
File:
PDF, 4.47 MB
english, 2018
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