Special Articles on Organic and Inorganic Optical Materials. Positive-Type Photoresists Using Photoinitiated Formation of Pendant Amino Groups. Effects of Comonomers on Solubility Alteration and Sensitivity of the Photoresists.
TSUNOOKA, Masahiro, KAWAMURA, Kazuyuki, Niu, TakayaYear:
1992
Journal:
NIPPON KAGAKU KAISHI
DOI:
10.1246/nikkashi.1992.1068
File:
PDF, 732 KB
1992