Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films
MIURA, Hideo, ISHITSUKA, Norio, SAITO, Naoto, OHTA, Hiroyuki, HASHIMOTO, Chiemi, IKEDA, ShujiVolume:
39
Year:
1996
Journal:
JSME international journal. Ser. A, Mechanics and material engineering
DOI:
10.1299/jsmea1993.39.2_166
File:
PDF, 776 KB
1996