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Crystal Plasticity Analysis of Dislocation Accumulation in Impurity Doped-ULSI Cells
SATO, Michihiro, OHASHI, Tetsuya, MARUIZUMI, Takuya, KITAGAWA, IsaoVolume:
75
Year:
2009
DOI:
10.1299/kikaia.75.1057
File:
PDF, 732 KB
2009