Optimization of Lens Adjustment in Semiconductor...

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Optimization of Lens Adjustment in Semiconductor Lithography Equipment Using Quadratically Constrained and Second Order Cone Programming(Mechanical Systems)

SHINANO, Yuji, YOSHIHARA, Toshiyuki, MIYASHIRO, Ryuhei, FUKAGAWA, Youzou
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Volume:
75
Year:
2009
DOI:
10.1299/kikaic.75.157
File:
PDF, 843 KB
2009
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