Synthesis of SiOC(–H) Films by the Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Method
Mori, Takanori, Masuko, Taiki, Shirakura, Akira, Suzuki, TetsuyaVolume:
13
Year:
2015
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2015.445
File:
PDF, 196 KB
english, 2015