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Development of magnetically driven micro valve using SU-8/Fe composite
SUZUKI, Junya, TERAO, Kyohei, TAKAO, Hidekuni, SHIMOKAWA, Fusao, OOHIRA, Fumikazu, SUZUKI, TakaakiVolume:
23
Year:
2015
Language:
english
Journal:
Journal of the Japan Society of Applied Electromagnetics and Mechanics
DOI:
10.14243/jsaem.23.407
File:
PDF, 1.51 MB
english, 2015