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Improvement of slot antennas for microwave plasma source through electromagnetic analysis
TAKABE, Yuki, YAMAMOTO, Takahiko, KOSHIJI, Kohji, KATAYAMA, Noboru, KOGOSHI, SumioVolume:
24
Year:
2016
Journal:
Journal of the Japan Society of Applied Electromagnetics and Mechanics
DOI:
10.14243/jsaem.24.240
File:
PDF, 1.11 MB
2016