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ZnO thin-film transistor grown by rf sputtering using Zn metal target and oxidizer pulsing
YOO, Dukyean, JEON, Wonjin, KIM, Junghwan, MENG, Jun, YANG, Youjung, JO, JungyolVolume:
125
Year:
2017
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj2.16236
File:
PDF, 424 KB
english, 2017