Rapid Plasma Etching for Fabricating Fused Silica Microchannels
MORIKAWA, Kyojiro, MATSUSHITA, Kazuki, TSUKAHARA, TakehikoVolume:
33
Year:
2017
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.33.1453
File:
PDF, 808 KB
english, 2017