![](/img/cover-not-exists.png)
Lighting equipment of clean-room to get rid of 0.1μm diameter particles
Oomi, T., Fukuda, M., Fujimaki, K., Yoneyama, M., Koizumi, M.Volume:
71
Year:
1987
DOI:
10.2150/jieij1980.71.appendix_107
File:
PDF, 1.33 MB
1987