Lighting equipment of clean-room to get rid of 0.1μm...

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Lighting equipment of clean-room to get rid of 0.1μm diameter particles

Oomi, T., Fukuda, M., Fujimaki, K., Yoneyama, M., Koizumi, M.
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Volume:
71
Year:
1987
DOI:
10.2150/jieij1980.71.appendix_107
File:
PDF, 1.33 MB
1987
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