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Analysis of Depth-dependence and Orientation Behavior of Micro-phase Separated Structure of Block Copolymer Thin Films Investigated with GISAXS Measurement Utilizing Low Energy X-rays
SAITO, Itsuki, YAMAMOTO, KatsuhiroVolume:
89
Year:
2016
Language:
english
Journal:
NIPPON GOMU KYOKAISHI
DOI:
10.2324/gomu.89.121
File:
PDF, 2.05 MB
english, 2016