Gas Phase Synthesis of Diamond on a Silicon with Microwave...

Journal of the Japan Society for Precision Engineering 1988 Vol. 54; Iss. 9

Gas Phase Synthesis of Diamond on a Silicon with Microwave Plasma CVD (1st Report)

YOSHIKAWA, Masanori, KANEKO, Yutaka, YANG, Cheng-Feng, TOKURA, Hitoshi, KAMO, Mutukazu
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Volume:
54
Year:
1988
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.54.1703
File:
PDF, 10.75 MB
english, 1988
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