An Ultra Precision Straight Motion System (2nd Report)

Journal of the Japan Society for Precision Engineering 1988 Vol. 54; Iss. 10

An Ultra Precision Straight Motion System (2nd Report)

MATSUMOTO, Hideki, YAMAGUCHI, Joji, AOYAMA, Hisayuki, SHIMOKOHBE, Akira
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Volume:
54
Year:
1988
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.54.1945
File:
PDF, 1.45 MB
english, 1988
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