![](/img/cover-not-exists.png)
An Electrostatically Driven Torsional Resonator with Two Degrees of Freedom (1st Report)
USUDA, Takashi, UMEDA, AkiraVolume:
62
Year:
1996
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.62.1292
File:
PDF, 3.80 MB
english, 1996