An Electrostatically Driven Torsional Resonator with Two...

An Electrostatically Driven Torsional Resonator with Two Degrees of Freedom (1st Report)

USUDA, Takashi, UMEDA, Akira
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Volume:
62
Year:
1996
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.62.1292
File:
PDF, 3.80 MB
english, 1996
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