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Clamping Characteristics of Pin-type Vacuum Chuck (1st Report)
UNE, Atsunobu, TSUSHIMA, Yoshio, MOCHIDA, Masaaki, MATSUI, Shinsuke, ISHIKAWA, Yoshimasa, OHIRA, FumikazuVolume:
64
Year:
1998
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.64.1517
File:
PDF, 4.70 MB
1998