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3D-shape Measurement of Rough Surface Using Wavelength Shift Interferometer under Unavoidable Random Changes of Optical Path Differences
ADACHI, Masaaki, SASAKI, YuuriVolume:
82
Year:
2016
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.82.384
File:
PDF, 2.89 MB
2016