Studies on Electrolytic Buffing of Single Crystal Silicon...

Studies on Electrolytic Buffing of Single Crystal Silicon (2nd Report)

HUYNH, Nhan van, TOKURA, Hitoshi, YOSHIKAWA, Masanori, ASAEDA, Toshio
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Volume:
43
Year:
1977
Journal:
Journal of the Japan Society of Precision Engineering
DOI:
10.2493/jjspe1933.43.650
File:
PDF, 1.73 MB
1977
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