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Preparation Conditions of rf-Sputter Deposited Fe/AlN Multilayered Thin Films and Their Properties.
Kikkawa, Shinichi, Enomoto, Shinsuke, Takahashi, Masao, Hirota, Ken, Yamaguchi, OsamuVolume:
45
Year:
1998
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.45.253
File:
PDF, 366 KB
1998