Effect of Ion Irradiation on ZnO Thin Film Prepared using...

Effect of Ion Irradiation on ZnO Thin Film Prepared using RF Magnetron Sputtering

TAKIGUCHI, Yosuke, TOYOTA, Hiroshi
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Volume:
58
Year:
2015
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.58.351
File:
PDF, 1001 KB
2015
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