Formation of SiO2 Protective Coating on SUS 304 Stainless Steel by Chemical Vapor Deposition using TEOS-O3 Gas System
Kikkawa, Shuji, Go, Tetsu, Hara, Nobuyoshi, Sugimoto, KatsuhisaVolume:
42
Year:
1993
Journal:
Zairyo-to-Kankyo
DOI:
10.3323/jcorr1991.42.275
File:
PDF, 912 KB
1993