Influence of Nitrogen Gas Partial Pressure on the Properties of TiN Deposited by Reactive Sputter Deposition.
NISHIMURA, Ikuya, YUHTA, Toshio, SAITOH, TsuyoshiVolume:
43
Year:
1992
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.43.584
File:
PDF, 2.07 MB
1992