Plasma Damage during Sputtering of Tantalum Oxide Thin...

Plasma Damage during Sputtering of Tantalum Oxide Thin Films on MOS Substrate by Selected Methods.

MASUI, Kanji, NOMURA, Tsuyoshi, KWON, Sik-Chol
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Volume:
44
Year:
1993
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.44.1108
File:
PDF, 654 KB
1993
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