Preparation of Ultra Fine Pattern Formation by Electro...

Preparation of Ultra Fine Pattern Formation by Electro Copper Plating.

ISHIBASHI, Junichi, TAKADA, Yuichi, HONMA, Hideo
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Volume:
49
Year:
1998
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.49.1130
File:
PDF, 812 KB
1998
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