Formation of ULSI Interconnection Using the Microcontact...

Journal of The Surface Finishing Society of Japan 2009 Vol. 60; Iss. 9

Formation of ULSI Interconnection Using the Microcontact Printing of Benzotriazole Derivative

ARIMURA, Hidetoshi, OYAMA, Yuto, TSURUOKA, Takaaki, AKAMATSU, Kensuke, NAWAFUNE, Hidemi
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Volume:
60
Year:
2009
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.60.598
File:
PDF, 1.41 MB
2009
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