Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD
YAMAMOTO, Shuji, HIDAKA, Noriaki, KAWANA, Atsuo, MASUDA, ChitoshiVolume:
63
Year:
2012
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.63.35
File:
PDF, 1.12 MB
2012