Investigation of the Nanoparticle Electrical Contact...

Journal of Microelectromechanical Systems 2017 / 12 Vol. 26; Iss. 6

Investigation of the Nanoparticle Electrical Contact Lubrication in MEMS Switches

Ko, Seung-Deok, Seo, Min-Ho, Yoon, Yong-Hoon, Han, Chang-Hoon, Lim, Keun-Seo, Kim, Chang-Keun, Yoon, Jun-Bo
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Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2017.2761811
Date:
December, 2017
File:
PDF, 2.61 MB
english, 2017
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