Direct formation of graphene on dielectric substrate:...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 03 Vol. 36; Iss. 2

Direct formation of graphene on dielectric substrate: Controlling the location of graphene formation adopting carbon diffusion barrier

Kim, Ki-Ju, Cho, Seong-Yong, Kim, Hyun-Mi, Kim, Ki-Bum
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5016591
Date:
March, 2018
File:
PDF, 2.08 MB
english, 2018
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