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Modeling and control of a PZT precise positioning device with a damper
SAKURADA, Akira, SAKAMOTO, Ryota, NAGANAWA, Akihiro, SHIBUYA, Yotsugi, MORI, ShigekiVolume:
23
Year:
2015
Language:
english
Journal:
Journal of the Japan Society of Applied Electromagnetics and Mechanics
DOI:
10.14243/jsaem.23.229
File:
PDF, 1.65 MB
english, 2015