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Annealing Behavior of La2O3 Thin Film Deposited on Si (001) Substrate Studied by Spherical Aberration Corrected TEM/STEM
Inamoto, Shin, Yamasaki, Jun, Okunishi, Eiji, Kakushima, Kuniyuki, Iwai, Hiroshi, Tanaka, NobuoVolume:
34
Year:
2009
Language:
english
Journal:
Transactions of the Materials Research Society of Japan
DOI:
10.14723/tmrsj.34.297
File:
PDF, 1.67 MB
english, 2009