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High-Rigidity Multi-Degrees-of-Freedom Fine Motion Mechanism using Piezoelectric Actuators (3rd Report)
KYUSOJIN, Akira, YAMAMOTO, Yosiaki, ISOBE, HiromiVolume:
63
Year:
1997
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.63.223
File:
PDF, 1.21 MB
english, 1997