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High-Precision Groove Machining and the Modeling of Single Layer Graphene Using Vibration of the Stage and Probe of AFM
ASHIBA, Naoki, HAMAZUME, Sho, DEMURA, Kazuya, IHARA, TohruVolume:
82
Year:
2016
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.82.764
File:
PDF, 2.72 MB
2016