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Increase in Size of Flaked Particles Suddenly Generated by Impulsive Force in Mass-production Plasma Etching Equipment
KASASHIMA, Yuji, UESUGI, FumihikoVolume:
59
Year:
2016
Language:
english
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.59.360
File:
PDF, 842 KB
english, 2016