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Comparison of the residual stress in TiNx films as determined by substrate deflection and X-ray stress measurement.
NISHIDA, Norihide, OKADA, Mitsumasa, HONDA, Kazuo, KAWASAKI, Hitoshi, HOSOKAWA, NorioVolume:
40
Year:
1989
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.40.332
File:
PDF, 324 KB
1989