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Effect of selected gases on diamond deposits synthesized by microwave plasma CVD.
CHEN, Chia-Fu, KO, Ensei, HOSOMI, Satoru, YOSHIDA, IsaoVolume:
41
Year:
1990
Language:
english
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.41.829
File:
PDF, 1.48 MB
english, 1990