Vacuum Equipment and Application for Thin Film in the...

Vacuum Equipment and Application for Thin Film in the Multimedia. High Density Magnetic Recording Media Generated by Ultra Clean Technology.

TAKAHASHI, Migaku
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Volume:
48
Year:
1997
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.48.1070
File:
PDF, 2.00 MB
1997
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