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Structures of Pt/Ti/SiO2/Al2O3 Multilayer Film Annealed in Various Ambients and their Temperature Coefficient of Resistance.
HANZAWA, Noriko, TOMONARI, Kenji, INOUE, Shin-ichi, YAMAGISHI, Kiyoshi, AOKI, Yoshihira, GOTOH, YoshihikoVolume:
53
Year:
2002
Language:
english
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.53.346
File:
PDF, 4.76 MB
english, 2002