ChemInform Abstract: THE KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE, A MASS SPECTROMETRIC INVESTIGATION BY MOLECULAR BEAM SAMPLING
FARROW, R. F. C.Volume:
5
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197440055
Date:
October, 1974
File:
PDF, 142 KB
1974