![](/img/cover-not-exists.png)
Low-energy ion irradiation in HiPIMS to enable anatase TiO2 selective growth
Cemin, Felipe, Tsukamoto, Makoto, Keraudy, Julien, Antunes, Vinícius Gabriel, Helmersson, Ulf, Alvarez, Fernando, Minea, Tiberiu, Lundin, DanielLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aac080
Date:
April, 2018
File:
PDF, 1.17 MB
english, 2018